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Keywords: Sensor sensitivity
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Journal Articles
Enhanced MEMS piezoresistive pressure sensor through silicon carbide diaphragm and chromium rod beams support integration in robust environmental sustainability
Available to Purchase
Journal:
Sensor Review
Sensor Review (2025) 45 (5): 610–624.
Published: 29 April 2025
... MEMS piezoresistive pressure sensor Localized stiffness Rod beam diaphragm Harsh environment Thin plate and small deflection theories Sensor sensitivity Initially essential to microelectronics, micro fabrication today makes it possible to create tiny mechanical systems integrates...
