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Keywords: Silicon on glass
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Journal Articles
Journal:
Sensor Review
Sensor Review (2020) 40 (3): 297–309.
Published: 09 July 2020
... by etching errors, cross stiffness and localization of stresses during failure (Li et al., 2016 ; Evstifeev, 2014). In this paper, we consider the effect of temperature on the ES eigenfrequencies with use of silicon on glass technology to enable the design of inertial sensors, such as gyroscopes...
