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Keywords: Silicon on insulator technology
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Journal Articles
Journal:
Sensor Review
Sensor Review (2020) 40 (3): 297–309.
Published: 09 July 2020
... Microelectromechanical systems Silicon on glass Silicon on insulator technology Suspensions Temperature coefficient of thermal expansion Temperature dependence The fields of microelectromechanical systems (MEMS) applications have been broadening over the past decade, with process development still...
