Keywords: Silicone
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Journal Articles
Sensor Review (2001) 21 (1): 33–38.
Published: 01 March 2001
...S.P. Beeby; N.J. Grabham; N.M. White This paper describes a self‐test procedure for a micromachined silicon accelerometer realized using a commercially available microprocessor. The accelerometer is fabricated using a combination of thick‐film printing and silicon micromachining. It consists...
Journal Articles
Sensor Review (2000) 20 (1)
Published: 01 March 2000
... and manufactures silicon, micromachined pressure sensors, accelerometers and custom microstructures, which are marketed worldwide. For further information please contact: EG&G IC Sensors Inc., 1701 McCarthy Boulevard, Milpitas, CA 95035, USA. Tel: 408 432 1800; Ext: 1222; Fax:408 432 7322. The ultra...

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