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Keywords: Silicone
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Journal Articles
Micromachined accelerometer with microprocessor controlled self‐test procedure
Available to Purchase
Journal:
Sensor Review
Sensor Review (2001) 21 (1): 33–38.
Published: 01 March 2001
...S.P. Beeby; N.J. Grabham; N.M. White This paper describes a self‐test procedure for a micromachined silicon accelerometer realized using a commercially available microprocessor. The accelerometer is fabricated using a combination of thick‐film printing and silicon micromachining. It consists...
Journal Articles
Journal:
Sensor Review
Sensor Review (2000) 20 (1)
Published: 01 March 2000
... Keywords Pressure sensors, Silicone An ultra-stable silicon die and isolation diaphragm design from EG&G IC Sensors improves pressure sensor performance and lowers cost (see Plate 5). The company reports that, compared to current products, the new Model 86 reduces linearity errors by 50...
