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Keywords: UV nanoimprint lithography
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Journal Articles
Journal:
Sensor Review
Sensor Review (2020) 40 (6): 629–635.
Published: 16 October 2020
..., which is a sandwich structure. The regular nanostructures increase the film roughness and contact area to enhance the friction effect. To enhance the performance of the pressure sensor, different nanostructures on soft polymer sensitive layers are fabricated using UV nanoimprint lithography to generate...
