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Keywords: Silicon wafer slicing
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Journal Articles
Online Experts Screening the Worst Slicing Machine to Control Wafer Yield via the Analytic Hierarchy Process
Available to Purchase
Journal:
Asian Journal on Quality
Asian Journal on Quality (2006) 7 (2): 141–156.
Published: 21 August 2006
...Chin‐Tsai Lin; Che‐Wei Chang; Cheng‐Ru Wu; Huang‐Chu Chen This study describes a novel algorithm for optimizing the quality yield of silicon wafer slicing. 12 inch wafer slicing is the most difficult in terms of semiconductor manufacturing yield. As silicon wafer slicing directly impacts production...
