The purpose of this paper is to discuss the numerical modelling of 3D structure of micro‐electro‐mechanical systems (MEMS) accelerometers. The general idea being discussed is the method of levitation force reduction, as the main source of incorrect mathematical model of comb drive structure.
Accelerometers design is a highly interdisciplinary area and, therefore, different methods and tools have to be exploited. Dynamic accelerometer behaviour modelling has been performed by use of a new object‐oriented model (NOOM), based on complex computer field and mechanical models.
The paper describes methods of levitation force reduction in electrostatic comb drive structures based on electrostatic structural models and finite elements method.
In the present work, the authors limit themselves to the electrostatic energy domains.
Both, mechanical and electric models of accelerometers give the input data for defining the object‐oriented model, based on Matlab‐Simulink platform, fulfilling the general demand of dynamic behaviour simulation of comb drive structure. The proposed by authors methodology could give valuable contribution to MEMS design methodology.
A new methodology has been successfully applied to calculation of levitation force in different geometries of comb drive. This methodology could be useful for multidisciplinary MEMS systems.
