Hybrid numerical method for effective design of silicon micromotor

This paper aims to focus on the hybrid numerical method for effective design of silicon micromotor.

In this work, the authors introduced finite element methods combined with LUA and Matlab. The paper focuses on analysis of electrostatic micromotor and uses computer simulation procedure leading to new structure design.

This strategy enables changing of all parameters of the micromotors MEMS. Moreover, this strategy allows for taking advantage of FEM, namely possibility of calculations of complicated geometries (different electromagnetic devices too) without additional operations.

A novel strategy in computer modeling of micromotor MEMS, based on the fast and very efficient hybrid method for analysis and design, is proposed.