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Purpose

– The purpose of this paper is to deal with the self-heating of semiconductor nano-devices.

Design/methodology/approach

– Transport in silicon semiconductor devices can be described using the Drift-Diffusion model, and Direct Simulation Monte Carlo (MC) of the Boltzmann Transport Equation.

Findings

– A new estimator of the heat generation rate to be used in MC simulations has been found.

Originality/value

– The new estimator for the heat generation rate has better approximation properties due to reduced statistical fluctuations.

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