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Journal Articles

ETCH PROFILE EVOLUTION IN LOW PRESSURE RF PLASMA WITH AXIAL MAGNETIC FIELD

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B.P. Mathur, K.I. Arshak, D. Mc Donagh, A. Arshak
Journal: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
COMPEL (1994) 13 (4): 677–684.
https://doi.org/10.1108/eb051885
Published: 01 April 1994
View article titled, ETCH PROFILE EVOLUTION IN LOW PRESSURE RF PLASMA WITH AXIAL MAGNETIC FIELD
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Journal Articles

TOPOGRAPHY SIMULATION IN PHOTOLITHOGRAPHY USING FINITE ELEMENT ANALYSIS AND A MODIFIED STRING ALGORITHM

Available to Purchase
K.I. Arshak, D. McDonagh, B.P. Mathur, A. Arshak
Journal: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
COMPEL (1994) 13 (4): 871–878.
https://doi.org/10.1108/eb051902
Published: 01 April 1994
View article titled, TOPOGRAPHY SIMULATION IN PHOTOLITHOGRAPHY USING FINITE ELEMENT ANALYSIS AND A MODIFIED STRING ALGORITHM
Open the PDF for TOPOGRAPHY SIMULATION IN PHOTOLITHOGRAPHY USING FINITE ELEMENT ANALYSIS AND A MODIFIED STRING ALGORITHM in another window
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