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Keywords: End effector
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Journal Articles
Industrial Robot (2012) 39 (1): 79–91.
Published: 06 January 2012
...Yanjie Liu; Meng Xu; Yumei Cao Purpose Wafer transfer robots play a significant role in IC manufacturing industry and the end effector is an important component of the robots. The purpose of this paper is to improve transfer efficiency of a wafer transfer robot through study of its end effector...
