... using single one control method only. Yanjie Liu can be contacted at: yjliu@hit.edu.cn © Emerald Group Publishing Limited 2010 Robotics Control technology Error handling Vibration During the process of wafer transferring, while the trajectory tracking is realized for the end...

... the magnitude of the errors based on instantaneous temperature readings and to use the predicted errors in an appropriate way which compensates and therefore eliminates the actual errors, (Eastwood, 2004 ; Eastwood and Webb, 2007). Mechanics Kinematics Error analysis Error handling Classification...