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Keywords: Microfiber array
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Journal Articles
Industrial Robot (2012) 39 (1): 79–91.
Published: 06 January 2012
..., and at the same time to reduce wafer deformation. Design/methodology/approach Finite element method is adopted to analyze wafer deformation. For wafer transfer robot working in vacuum, for the first time, the authors apply the research of microfiber arrays inspired by gecko to the design of robot's end...

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