...Robert Bogue Purpose This paper aims to illustrate the growing role of robots in the electronics industries. Design/methodology/approach Following a short introduction, this paper discusses robotic applications and products in three sectors of the electronics industry: semiconductor processing...

... of this paper is to develop a technique to improve the wafer handling performance in semiconductor manufacturing. Design/methodology/approach The kinematics model of the wafer handling robot is developed. Two sensor location calibration algorithms are proposed. Method I is based on the wafer handling path...

...Mike Tao Zhang; Ken Goldberg Purpose Semiconductor manufacturing industry requires highly accurate robot operation with short install/setup downtime. Design/methodology/approach We develop a fast, low cost and easy‐to‐operate calibration system for wafer‐handling robots. The system is defined...

...Jon Rigelsford © MCB UP Limited 2002 --> Patents Robots Semiconductors Robotics Dual robotic arm end effectors Applicant: Genmark Automation, Inc., USAPatent number: US6,121,743Publication date: 15 May 2001Title: Dual robotic arm end effectors having independent yaw...

...R.P. Donovan Contamination‐free Manufacturing for Semiconductors and Other Precision Products . Marcel Dekker , 2001 . 448 pp. , ISBN: 0‐8247‐0380‐4   US$165.00 (hardback) © MCB UP Limited 2002 --> Semiconductors Contamination Manufacturing Contamination...

...Takashi Katsuma Various revolutions continue in the technology of semiconductor manufacturing and equipment. The transfer system used in a vacuum is indispensable to the semiconductor manufacturing process, and the vacuum manipulator is the main component of this system. Yaskawa, which...

...Jon Rigelsford © MCB UP Limited 2002 --> Internet Semiconductors LCD Precision instruments Keywords: Internet, Semiconductors, LCD, Precision instruments http://www.genmarkautomation.com/ Genmark Automation, Inc. Genmark Automation, Inc., was founded in 1986...

...Chiaki Tsuzuku Today, most of the high technology products around us require high performance semiconductors, and information technology (IT) is fully utilized in these products. The IT revolution is due largely to the remarkable progress of semi‐conductor technology. Robots are expected to handle...

... and serve mechanisms. They have been involved in semiconductor automation since the mid-1980s and have installed more than 1,600 systems in both the front and back end of the semiconductor processing industry. Adept's expertise in integrating robotic hardware, software, controllers and vision will prove...

... Motoman's SuperMechatronics solutions for semiconductor handling include ultra-clean vacuum and atmospheric robotic arms; specially designed wafer process motors;multi-axis, high-speed controllers specifically designed for vertical integration of OEM wafer process tools and material handling...