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Keywords: Wafer transfer acceleration
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Journal Articles
Industrial Robot (2012) 39 (1): 79–91.
Published: 06 January 2012
... . Meng Xu can be contacted at: xumeng_hit@126.com © Emerald Group Publishing Limited 2012 Wafer transfer robot End effector Microfiber array Wafer transfer acceleration Wafer deformation As a major equipment of IC manufacturing industry, wafer transfer robot undertakes...
