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Keywords: Circuits
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Journal Articles
Journal of Manufacturing Technology Management (2009) 20 (8): 1166–1182.
Published: 23 October 2009
... will be more stable when the integrated dispatching rule is used for control of the wafer schedule. Originality/value The paper developed a new dispatching rule for wafer fabrication concerned with rework for photolithography. Circuits Manufacturing systems Despatch Modelling Simulation...
