Semiconductor characterization software provides simultaneous HF and quasistatic C-V measurements
Keyword: Semiconductors
Keithley Instruments, Inc. has introduced capacitance characterization software for its Model 4200-SCS Semiconductor Characterization System. (Plate 4)The new capabilities allow users to conduct simultaneous high frequency (HF) and quasistatic (QS) C-V measurements on wafer devices with a single voltage sweep,using Keithleys Model 82 Simultaneous C-V instrumentation. This technique improves C-V measurement accuracy by reducing the voltage stress on the devices under test and eliminating the need for the use of theoretical curves and doping profile assumptions.
Simultaneous C-V requires only half the sweep time of sequential HF/QS measurements, so it also increases test productivity.
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Plate 4
