Newport announces advanced automation for MEMS packaging

Newport announces advanced automation for MEMS packaging

Keywords: MEMS, Packaging

Newport Corporation has announced the availability of advanced tools for automating the manufacturing of micro-electro-mechanical systems (MEMS) and micro-optical electro-mechanical systems (MOEMS) packaging. Newport's MRSI-5005 advanced packaging assembly work cell is configured for automated assembly of these delicate devices (Plate 4). Newport has successfully leveraged its assembly technology from optical and microwave packaging to provide a turnkey solution for the automated assembly of MEMS/MOEMS devices. Interconnect technologies include eutectic die attach, epoxy die attach and flip chip.

Plate 4 The MRSI-5005 advanced packaging assembly work cell

Newport's MRSI-5005 advanced packaging assembly work cell features are specifically designed to address the unique requirements and challenges of MEMS and MOEMS assembly. For example, "feature touch" force control, combined with closed loop force feedback, provides the ability to handle the devices without damage to internal micro structures. The thermally and mechanically stable machine platform delivers 5 micron placement accuracy in a clean environment,which is required for a high-yield assembly process for these devices. Advanced vision provides the ability and flexibility to perform local top surface alignments as well as alignment to bottom features. Material presentation methods include waffle pack, Gel-Pak, wafer and others.