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Reduction of the warping of a silicon wafer coated with two thin layers by minimal geometric modifications

Imad El Fatmi, Soufyane Belhenini, Abdellah Tougui

Microelectronics International (2024) 41 (2): 96–102.

https://doi.org/10.1108/MI-02-2022-0025

Published: 26 April 2023

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