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Keywords: 3D LTCC structure
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2011) 28 (3): 31–35.
Published: 02 August 2011
... on the design of a capacitive gas‐pressure sensor in a 3D LTCC structure. The present study provides a good basis for further optimisation of the design of the cofired electrodes in the capacitive sensing structure. Marina Santo Zarnik can be contacted at: marina.santo@ijs.si © Emerald Group Publishing...
