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Keywords: Back end process
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Journal Articles
Simone Luigi Marasso, Simone Benetto, Isabella Para, Chiara Ottone, Domenico Mombello, Denis Perrone, Sergio Ferrero, Luciano Scaltrito, Diego Pugliese, Matteo Cocuzza, Fabrizio Candido Pirri
Journal:
Microelectronics International
Microelectronics International (2017) 34 (2): 69–74.
Published: 02 May 2017
... 24 05 2016 05 06 2016 © Emerald Publishing Limited 2017 Emerald Publishing Limited Licensed re-use rights only Electroplating Back end process SU-8 The interest in developing simple processing, of low cost and with high aspect ratios (ARs) micro electro-mechanical...
