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Keywords: Biosensor
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Journal Articles
Journal Articles
Journal Articles
Microelectronics International (2017) 34 (2): 99–107.
Published: 02 May 2017
... collection and spectral processing. Al metal was deposited on the developed negative photoresist (NP) using a thermal evaporator (Edwards Auto 306) at 3.0E-5 Torr. Current-to-voltage measurements were performed by Keithley 6487 Picoammeter/Voltage Source at room temperature. Ensuring that this biosensor can...
Journal Articles
Microelectronics International (2011) 28 (3): 24–30.
Published: 02 August 2011
... to any expansion of nanogap pattern. This means that, after 7 h oxidation, the polysilicon layer is completely oxidized. By indicating the trend of oxide growth with respect to time, the expansion of nanogap can be easily controlled to the maximum oxide growth. Lateral nanogap Biosensor Dielectric...

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