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Keywords: Capacitive‐to‐digital conversion
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Journal Articles
Design study for a capacitive ceramic pressure sensor
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2011) 28 (3): 31–35.
Published: 02 August 2011
... for the thick‐film electrodes of the capacitive sensing structure were studied and compared. The test sensors were designed for the pressure range 0‐10 kPa and manufactured with readout electronics based on a capacitance‐to‐digital conversion. Findings The typical sensitivity obtained was 4 fF/kPa...
