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Keywords: Capacitive pressure sensor
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Journal Articles
Design study for a capacitive ceramic pressure sensor
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2011) 28 (3): 31–35.
Published: 02 August 2011
...Marina Santo Zarnik; Darko Belavič; Srečko Maček Purpose The purpose of this paper is to consider a capacitive pressure sensor fabricated using low‐temperature cofired ceramic (LTCC) materials and technology as a candidate for an energy‐autonomous sensor application. Designing the 3D capacitive...
