Keywords: Coatings
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Journal Articles
Microelectronics International (2010) 27 (2): 117–120.
Published: 11 May 2010
... composition. Originality/value PS is found to be an excellent anti‐reflection coating against incident light when it is compared with another anti‐reflection coating and exhibits good light‐trapping of a wide wavelength spectrum which produce high efficiency solar cells (11.23 per cent). Asmiet...
Journal Articles
Journal Articles
Microelectronics International (2003) 20 (1)
Published: 01 April 2003
... © MCB UP Limited 2003 --> SUSS MicroTec Coatings New versatile spin coater from SUSS MicroTec Keywords: SUSS MicroTec, Coatings SUSS MicroTec has announced the Delta 80, a new Spin Coater that offers both the patented GYRSET™ system known from the former RC...
Journal Articles
Microelectronics International (2002) 19 (1)
Published: 01 April 2002
... --> Coatings MEMS Keywords: Coatings, MEMS Recent MEMS applications demand completely tension-free PECVD coatings of silicon nitride, silicon oxynitride and silicon carbide films with special thicknesses. For sensors, free-standing structures are fabricated by initially depositing a layer...
Journal Articles
Microelectronics International (2001) 18 (2)
Published: 01 August 2001
... © MCB UP Limited 2001 --> LOT Hardness testing Coatings Introducing the technique for the dynamic hardness measurement of thin films and coatings Keywords LOT, Hardness testing, Coatings It is now possible to measure the dynamic hardness of thin films...
Journal Articles

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