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Keywords: Contamination
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Journal Articles
Microelectronics International (2013) 30 (3): 176–186.
Published: 26 July 2013
... to find the key process out of the manufacturing flow; a non‐destructive detaching method and cross section polishing were used to inspect the bond integrity; Auger analysis assisted with argon ion sputter was tried to confirm the contamination; finally the manufacturing processes were redesigned...
Journal Articles
Journal Articles
Microelectronics International (2009) 26 (3): 41–48.
Published: 31 July 2009
... structures and compositions including Fourier transform infrared spectrometer (FTIR), scanning electron microscopy, and energy‐dispersive X‐ray spectroscopy are conducted. Findings The residues on the golden finger are identified to be the flux used in the assembly processes. Besides, the contaminants...
Journal Articles
Microelectronics International (2001) 18 (2)
Published: 01 August 2001
... Festo pneumatic drives reduce contamination from semiconductor processing equipment Keywords Festo, Cleanrooms, Contamination, Semiconductors Festo pneumatic drives have been selected as a cleaner and more compact alternative to conventional electric drives by German semiconductor...

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