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Keywords: Crystal orientation
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Journal Articles
Alhan Farhanah Abd Rahim, Aida Azrenda Mustakim, Nurul Syuhadah Mohd Razali, Ainorkhilah Mahmood, Rosfariza Radzali, Ahmad Sabirin Zoolfakar, Yusnita Mohd Ali
Journal:
Microelectronics International
Microelectronics International (2020) 37 (1): 46–53.
Published: 16 January 2020
...) technique. This study aims to compare the effect of different crystal orientation of Si n(100) and n(111) on the structural and optical characteristics of the PS. Design/methodology/approach PS was fabricated using ACPEC etching with a current density of J = 10 mA/cm2...
