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Keywords: Damping
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Journal Articles
A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS)
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2017) 34 (1): 9–21.
Published: 03 January 2017
... and mechanical loads are reviewed. These studies include failures due to fatigue loads, mechanical vibration, mechanical shock, humidity, temperature and particulate contamination. In addition, the influence of squeeze film air damping on the dynamic response of MEMS devices is briefly discussed. A further...
Journal Articles
Optically-detected nonlinear oscillations of single crystal silicon MEMS accelerometers
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2016) 33 (2): 107–115.
Published: 03 May 2016
... 04 05 2015 07 09 2015 18 12 2015 © Emerald Group Publishing Limited 2016 Emerald Group Publishing Limited Licensed re-use rights only Nonlinearity Damping Harmonic Resonance Silicon MEMS accelerometer Micro-electromechanical systems (MEMS) accelerometers...
