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Keywords: Deposition
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (1996) 13 (3): 30–32.
Published: 01 December 1996
...M. Borsetto; G. Carcano; M. Ceriani Polyimide deposition of thick layers (50‐60 μm after soft‐bake) is very important in the field of microelectronics; in particular for fabrication of microwave circuits for telecommunications, micromachining applications, MCM‐D and, in general, for pattern...
