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Journal Articles

Spin Coating Study for Thick Layers with High Viscosity Polyimide

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M. Borsetto, G. Carcano, M. Ceriani
Journal: Microelectronics International
Microelectronics International (1996) 13 (3): 30–32.
https://doi.org/10.1108/13565369610800377
Published: 01 December 1996
View article titled, Spin Coating Study for Thick Layers with High Viscosity Polyimide
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Journal Articles

Spin Coating with High Viscosity Photoresist on Square Substrates — Applications in the Thin Film Hybrid Microwave Integrated Circuit Field

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G. Carcano, M. Ceriani, F. Soglio
Journal: Microelectronics International
Hybrid Circuits (1993) 10 (3): 12–20.
https://doi.org/10.1108/eb044507
Published: 01 March 1993
View article titled, Spin Coating with High Viscosity Photoresist on Square Substrates — Applications in the Thin Film Hybrid Microwave Integrated Circuit Field
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