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Journal Articles

Spin Coating with High Viscosity Photoresist on Square Substrates — Applications in the Thin Film Hybrid Microwave Integrated Circuit Field

G. Carcano, M. Ceriani, F. Soglio

Hybrid Circuits (1993) 10 (3): 12–20.

https://doi.org/10.1108/eb044507

Published: 01 March 1993

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