... of the lamination pressure does not affect significantly the dielectric parameters of the LTCC substrates. Originality/value This paper shows two aspects of the fabrication of the microfluidic-microwave LTCC devices. First, the resolution of the applied metallization is critical in manufacturing high-frequency...

... Equation 5 Equation 6 Equation 7 Equation 8 Equation 9 The Taguchi DoE methodology permits the rough analysis of the membrane deflection for different co-firing process parameters. The optimal co-firing process conditions which ensure the minimal...

... of sensor dimensions on sensor response would demand a lot of repetition of the experiment with a different set of input parameters. Hence, DoE methodology was chosen to decrease the number of needed repetitions of the analyses. Influences of seismic mass and beam width were investigated in this work...