... of the lamination pressure does not affect significantly the dielectric parameters of the LTCC substrates. Originality/value This paper shows two aspects of the fabrication of the microfluidic-microwave LTCC devices. First, the resolution of the applied metallization is critical in manufacturing high-frequency...

... Equation 7 Equation 8 Equation 9 Equation 3 © Emerald Group Publishing Limited 2014 LTCC Deformation DoE Membrane Co-firing Taguchi Low temperature co-fired ceramics (LTCC) (Golonka, 2006 ; Thelemann et al., 2002 ; Gongora-Rubio...

... parameters. Hence, DoE methodology was chosen to decrease the number of needed repetitions of the analyses. Influences of seismic mass and beam width were investigated in this work, therefore, design PS/DK 3² were applied in the analyses. The design enabledus to estimate statistically...