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Keywords: Electrostatic force microscope (EFM)
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2026) 43 (1): 13–18.
Published: 16 October 2025
.... The thickness of ZnO thin film is tested using by elliptical polarizer. The dielectric performance of ZnO thin film was investigated by electrostatic force microscope ( EFM ). Findings The results show that there is a significant phase angle lag and enhanced dielectric properties at the grain boundaries...
Journal Articles
Journal:
Microelectronics International
Microelectronics International (2024) 41 (4): 181–185.
Published: 09 July 2024
... electrical transport performance Conductive atomic force microscope (C-AFM) Electrostatic force microscope (EFM) Grain boundary barrier the National Natural Science Foundation of China 62274141 52303335 62264007 Figure 5 Height, current and phase sections analysis of the middle white...
