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Keywords: Fluorine implantation
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Journal Articles
Fluorine implantation for nanostructured silicon Zener diodes: a study on electrical characterization and reliability
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2026) 43 (1): 19–26.
Published: 20 November 2025
... measurement to assess the performance enhancements enabled by fluorine implantation. Findings BF 2-implanted Zener diodes exhibit superior electrical characteristics, including a 45.8% reduction in dynamic resistance, a 52.3% suppression of reverse leakage current and a higher Zener voltage...
