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Keywords: Interface
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2023) 40 (1): 46–52.
Published: 11 October 2022
... with sapphire orientation was associated to the interface between the AlN and the sapphire. The results from this study would provide a guideline in selecting suitable orientation of sapphire for obtaining desirable AlN crystals, in particular, for reducing threading dislocation density in the AlN/sapphire...
