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Keywords: LDV
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2021) 38 (2): 60–65.
Published: 19 July 2021
... structures are released using wet etch after the mechanical dicing. © Emerald Publishing Limited 2021 Emerald Publishing Limited Licensed re-use rights only Lorentz force Vacuum Dicing Helmholtz coil LDV Quality factor Aditi can be contacted at: aditi@ceeri.res.in 14 12...
