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Keywords: LTCC micro-hotplate
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2020) 37 (1): 29–35.
Published: 23 December 2019
... of LTCC-based micro-hotplates on the power consumption and temperature for gas-sensing applications. Design/methodology/approach The LTCC micro-hotplates with different thicknesses are designed and fabricated. The role of thermal mass on power consumption and temperature of these hotplates...
