... of providing active surface that can be easily modified for immobilizations of biomolecules. Lateral nanogap Biosensor Dielectric capacitor Polysilicon Oxide semiconductor Lithography Electrodes Capacitors The present invention relates to a process of forming an electrode having a nanogap...

... Keywords Karl Suss, Motorola, Lithography Karl Suss announced that it has finalized an agreement with Motorola Labs to offer proprietary new mask protection technology (MPT) to its worldwide client base. The immediate customer benefit of this new technology includes significantly...

... Guidance System (AGS) optimizes wafer movement by calculating the optimal wafer path before movement is initiated,resulting in the transport of each wafer at the precise moment necessary for consistent process results. Until now, lithography track systems have been based on a linear design developed...

... Building on the success of previous generations of step-and-scan lithography systems, Silicon Valley Group has unveiled the semiconductor industry's first production-worthy 193nm step-and-scan lithography system. At the same time, the company also introduced an aggressive lithography roadmap...