...Muhammad Ahmad Raza Tahir; Muhammad Mubasher Saleem; Syed Ali Raza Bukhari; Amir Hamza; Rana Iqtidar Shakoor Purpose This paper aims to present an efficient design approach for the micro electromechanical systems (MEMS) accelerometers considering design parameters affecting the long-term...

... in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane. Design/methodology/approach Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid...

...Peyman Rafiee; Golta Khatibi; Michael Zehetbauer Purpose The purpose of this paper is to provide an overview of the major reliability issues of microelectromechanical systems (MEMS) under mechanical and environmental loading conditions. Furthermore, a comprehensive study on the nonlinear behavior...

...Mingzhi Dong; Fabio Santagata; Robert Sokolovskij; Jia Wei; Cadmus Yuan; Guoqi Zhang Purpose – This study aims to provide a flexible and cost-effective solution of 3D heterogeneous integration for applications such as micro-electro-mechanical system (MEMS) applications and smart sensor systems...

... Printed circuits MEMS In terms of commercial sensor systems, there are a large number of six‐DOF commercial wireless inertial sensors on the market: a 2.45 GHz wireless inertial measurement unit (WIMU) is available from Microstrain Microminiature Sensors (2008) with a size of 58×43×26 mm...

... infra‐red laser ablation. Originality/value The laser ablation of LTCC by optical fibre sources is discussed. © Emerald Group Publishing Limited 2007 MEMS Electronic equipment and components Ceramics With the development of MEMS technology, miniaturisation technology is rapidly...

... © MCB UP Limited 2003 --> MEMS Packaging Newport announces advanced automation for MEMS packaging Keywords: MEMS, Packaging Newport Corporation has announced the availability of advanced tools for automating the manufacturing of micro-electro-mechanical systems...

... © MCB UP Limited 2002 --> MEMS Standards Keywords: MEMS, Standards This month, executives from leading micro- electromechanical systems (MEMS)companies and institutes met at SUSS MicroTec in Garching, Germany, to define standards for international MEMS practice...

... --> Coatings MEMS Keywords: Coatings, MEMS Recent MEMS applications demand completely tension-free PECVD coatings of silicon nitride, silicon oxynitride and silicon carbide films with special thicknesses. For sensors, free-standing structures are fabricated by initially depositing a layer...