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Keywords: MISFET
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2020) 37 (2): 103–107.
Published: 05 March 2020
...Piotr Firek; Jakub Szarafiński; Grzegorz Głuszko; Jan Szmidt Purpose The purpose of this study is to directly measure and determine the Si/SiO2/AlOxNy interface state density on metal insulator semiconductor field effect transistor (MISFET) structures. The primary advantage of using aluminum...
