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Keywords: Metals
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Journal Articles
Functional room temperature metal (Al or Pd)‐ZrO2 (smooth or porous surface)‐Si MOS capacitor O2 sensor
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Journal:
Microelectronics International
Microelectronics International (2011) 28 (1): 50–57.
Published: 25 January 2011
...Mun Teng Soo; Kuan Yew Cheon; Ahmad Fauzi Mohd Noor Purpose The purpose of this paper is to report on metal‐oxide‐semiconductor (MOS) capacitor‐based O2 sensors with different catalytic metal electrode (Al or Pd), deposited on both smooth and porous surface (pore diameter ranging from...
