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Keywords: Microplasma
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2016) 33 (3): 149–154.
Published: 01 August 2016
... Licensed re-use rights only LTCC Thick-film Dielectric barrier discharge (DBD) Microplasma Microplasmas, also called microdischarges, have attracted much attention in recent years (Tachibana, 2006 ; Becker et al., 2010). First reason is possibility to operation at the high...
