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Keywords: Nonlinearity
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Journal Articles
A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS)
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2017) 34 (1): 9–21.
Published: 03 January 2017
...Peyman Rafiee; Golta Khatibi; Michael Zehetbauer Purpose The purpose of this paper is to provide an overview of the major reliability issues of microelectromechanical systems (MEMS) under mechanical and environmental loading conditions. Furthermore, a comprehensive study on the nonlinear behavior...
Journal Articles
Optically-detected nonlinear oscillations of single crystal silicon MEMS accelerometers
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2016) 33 (2): 107–115.
Published: 03 May 2016
...Peyman Rafiee; Golta Khatibi; Francesco Solazzi Purpose The purpose of this study is to address the nonlinear oscillations of single-crystal silicon micro-electromechanical systems (MEMS) accelerometers subjected to mechanical excitation. Methodology/approach The nonlinear behavior...
