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Keywords: Optical sensors
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2000) 17 (3)
Published: 01 December 2000
.... The main benefit is the lidding process, where the complete array is covered in one operation with optical grade glass within a vacuum process. Glass cleaning, greatly reduced handling and improved cleanliness in the cavity are all further benefits to the optical sensor market. The array can contain...
