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Keywords: PESL
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2002) 19 (2)
Published: 01 August 2002
... © MCB UP Limited 2002 --> PESL Scribe and break 100-3 for delicate wafers Keyword: PESL The Scribe 100-3 is another machine from Production Equipment Sales Limited(PESL) developed for the new generation of delicate die wafers. High accuracy (1µm resolution...
