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Keywords: Perforation
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2020) 37 (3): 147–153.
Published: 29 April 2020
... proposed for the first time. Rather than perforation, we propose patterned thinning of the diaphragm so that specific regions on it are thinner. This method allows the diaphragm to deflect more in response with regard to the pressure. The best excavation depth has been calculated and a pressure sensor...
