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Keywords: Photolithography
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2014) 31 (2): 78–85.
Published: 29 April 2014
...Tijjani Adam; U. Hashim Purpose – The purpose of this study is to present reports on fabrication of silicon (Si) nanowires (NWs). The study consists of microwire formation on silicon-on-insulator (SOI) that was fabricated using a top-down approach which involved conventional photolithography...
Journal Articles
Journal:
Microelectronics International
Microelectronics International (2012) 29 (1): 40–46.
Published: 20 January 2012
... Publishing Limited 2012 Microelectronics Electrodes Capacitance Nanotechnology Photolithography Size reduction Physical characterization Nanogap The development of easy, low‐cost and high‐throughput techniques for the fabrication of nanostructures has been of great interest for both...
