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Keywords: Planarisation
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Journal Articles
Thin‐film processing on a thick‐film multilayer
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (1998) 15 (1): 11–14.
Published: 01 April 1998
..., a thick‐film hybrid has an inappropriate surface for further successful thin‐film processing. In this work, the influence of surface roughness and topography on the properties of thin‐film conductors and the fabrication of vias is investigated. Surface smoothing and local planarisation can be achieved...
