Keywords: Pressure sensors
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Journal Articles
Journal Articles
Microelectronics International (1998) 15 (3): 26–30.
Published: 01 December 1998
...Darko Belavič; Stojan Šoba; Marko Pavlin; Dubravka Ročak; Marko Hrovat Silicon piezoresistive pressure sensor dies are mounted on a ceramic substrate where the signal conditioning electronics are implemented in thick film technology. In this paper some of these techniques, e.g. special attachment...

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