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Keywords: RF magnetron sputtering
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Journal Articles
Anis Suhaili Bakri, Nafarizal Nayan, Chin Fhong Soon, Mohd Khairul Ahmad, Ahmad Shuhaimi Abu Bakar, Wan Haliza Abd Majid, Nur Amaliyana Raship
Journal:
Microelectronics International
Microelectronics International (2021) 38 (3): 99–104.
Published: 16 June 2021
... aluminium nitride (AlN) thin films. Design/methodology/approach The AlN films were prepared using RF magnetron sputtering plasma on a silicon substrate without any external heating with various deposition times. The films were characterized using X-ray diffraction (XRD), field-emission scanning electron...
